Autoloader Calibration Procedures


Click the Xs to perform each procedure below.

Procedures

2135

Verify and Adjust the Robot Z Train Points

X
Adjust and Verify the Shoulder and End Effector Train Points
X
Align the Mapping System
X
Level the Cassette Carrier
X
Fine Tune Wafer Thickness
X
Adjust the LED Beam to End Effector Distance
X
Test Rough Load Position
X
Adjust Fine Load Position
X
Test and Adjust Robot Z Air Cylinder
X
Test and Adjust Pneumatic Relief Valve